JPS5943326A - 半導体圧力検出器 - Google Patents

半導体圧力検出器

Info

Publication number
JPS5943326A
JPS5943326A JP15261082A JP15261082A JPS5943326A JP S5943326 A JPS5943326 A JP S5943326A JP 15261082 A JP15261082 A JP 15261082A JP 15261082 A JP15261082 A JP 15261082A JP S5943326 A JPS5943326 A JP S5943326A
Authority
JP
Japan
Prior art keywords
strain
diaphragm
pressure
housing
thermal expansion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15261082A
Other languages
English (en)
Japanese (ja)
Other versions
JPH028253B2 (en]
Inventor
Michitaka Shimazoe
島添　道隆
Yoshitaka Matsuoka
松岡　祥隆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15261082A priority Critical patent/JPS5943326A/ja
Publication of JPS5943326A publication Critical patent/JPS5943326A/ja
Publication of JPH028253B2 publication Critical patent/JPH028253B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
JP15261082A 1982-09-03 1982-09-03 半導体圧力検出器 Granted JPS5943326A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15261082A JPS5943326A (ja) 1982-09-03 1982-09-03 半導体圧力検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15261082A JPS5943326A (ja) 1982-09-03 1982-09-03 半導体圧力検出器

Publications (2)

Publication Number Publication Date
JPS5943326A true JPS5943326A (ja) 1984-03-10
JPH028253B2 JPH028253B2 (en]) 1990-02-23

Family

ID=15544157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15261082A Granted JPS5943326A (ja) 1982-09-03 1982-09-03 半導体圧力検出器

Country Status (1)

Country Link
JP (1) JPS5943326A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6414509U (en]) * 1987-07-20 1989-01-25

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52119971A (en) * 1976-03-31 1977-10-07 Honeywell Inc Force converter
JPS5629136A (en) * 1979-07-17 1981-03-23 Data Instr Inc Pressure converter and making method thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52119971A (en) * 1976-03-31 1977-10-07 Honeywell Inc Force converter
JPS5629136A (en) * 1979-07-17 1981-03-23 Data Instr Inc Pressure converter and making method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6414509U (en]) * 1987-07-20 1989-01-25

Also Published As

Publication number Publication date
JPH028253B2 (en]) 1990-02-23

Similar Documents

Publication Publication Date Title
US7444879B2 (en) Displacement transducer
US6813956B2 (en) Double stop structure for a pressure transducer
JP2775430B2 (ja) 真空表示装置付き圧力センサー
US7290453B2 (en) Composite MEMS pressure sensor configuration
US5012677A (en) Differential pressure transmitter
US5537882A (en) Semiconductor sensor for detecting physical amount without thermal hypsteresis where output wiring is disposed in a stress insensitive direction
JP2503290B2 (ja) 半導体圧力・差圧測定ダイヤフラム
US4527428A (en) Semiconductor pressure transducer
JPS5943326A (ja) 半導体圧力検出器
JPH0419495B2 (en])
JPH04328434A (ja) 複合センサ
JP2715738B2 (ja) 半導体応力検出装置
JP2512220B2 (ja) 複合機能形センサ
JPH10142086A (ja) 半導体圧力センサとその製造方法及びこれを用いた差圧伝送器
JPH0254137A (ja) 半導体圧力センサー
JPS6328260B2 (en])
JPS6155264B2 (en])
JP3120388B2 (ja) 半導体圧力変換器
JPH06102128A (ja) 半導体複合機能センサ
JPH0821774A (ja) 半導体圧力センサ及びその製造方法
JPH0483139A (ja) 半導体歪みセンサ
Whittier High performance miniaturized piezoresistive pressure transducers
JP2980440B2 (ja) 半導体圧力センサおよびその製造方法
JPH06213746A (ja) 半導体圧力センサ
JPS5925393B2 (ja) 半導体ひずみゲ−ジ形ダイアフラム